Electrostatically excited diaphragm driven as a loudspeaker

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 430-433

  Rangsten, P ^a   Smith, L ^a   Rosengren, L ^a   Hok, B ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; BONDING; DAMPING; ELECTRIC FREQUENCY CONTROL; ELECTROSTATIC DEVICES; LOUDSPEAKERS; MICROMACHINING; NATURAL FREQUENCIES; PERMITTIVITY; PRESSURE TRANSDUCERS; SUBSTRATES; ULTRASONIC DEVICES;

ACTUATION PRINCIPLE; ELECTROSTATIC ACTUATION; ELECTROSTATIC ACTUATORS; ELECTROSTATICALLY EXCITED DIAPHRAGM; IMPEDANCE MATCHING;

DIAPHRAGMS;

EID: 0029489601     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)