Comparison of mass-sensitive devices for gas sensing: bulk acoustic wave (BAW)- and surface acoustic wave (SAW) transducers

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 728-731

  Bodenhoefer, K ^a   Hierlemann, A ^a   Noetzel, G ^a   Weimar, U ^a   Goepel, W ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CHEMICAL SENSORS; COATING TECHNIQUES; CRYSTALS; ELECTRODES; GOLD; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC MATERIALS; QUARTZ; SURFACES; THERMAL EFFECTS; VOLATILE ORGANIC COMPOUNDS;

BULK ACOUSTIC WAVE TRANSDUCERS; MASS SENSITIVE DEVICES; MINIMUM THRESHOLD VALUE; SURFACE ACOUSTIC WAVE TRANSDUCERS;

ACOUSTIC TRANSDUCERS;

EID: 0029489478     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)