Debris-free soft x-ray generation using a liquid droplet laser-plasma target

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2523, Issue , 1995, Pages 88-93

  Hertz, Hans M ^a   Rymell, Lars ^a   Berglund, Magnus ^a   Malmqvist, Lars ^a  

^a LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DROP FORMATION; LASER PRODUCED PLASMAS; LIQUIDS; MICROSCOPES; PHOTONS; ULTRAVIOLET RADIATION; X RAY LITHOGRAPHY;

DEBRIS-FREE SOFT X RAYS; EXTREME ULTRAVIOLET; X RAY MICROSCOPY;

X RAY PRODUCTION;

EID: 0029488708     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.221000     Document Type: Conference Paper

References (25)