Structure, mechanical and tribological properties of d.c. magnetron sputtered TiB2 and TiB2(N) thin films

Surface and Coatings Technology

Volumn 76-77, Issue PART 2, 1995, Pages 609-614

  Deng, H ^a   Chen, J ^a   Inturi, R B ^a   Barnard, J A ^a  

^a UNIVERSITY OF ALABAMA   (United States)

Author keywords

Crystalline structure; d.c. magnetron sputtering; Mechanical properties; TiB2 and TiB2(N); Tribology

Indexed keywords

AMORPHOUS FILMS; BORIDE COATINGS; COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; STRESS ANALYSIS; TEXTURES; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE;

TITANIUM DIBORIDE; WEAR VOLUME LOSSES;

CERAMIC COATINGS;

EID: 0029488499     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02517-0     Document Type: Article

References (14)

1. Hardness Of Amorphous Hard Carbon Films Determined By The Ultra-Low Load Microindentation Technique
2. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments