New method for testing hermeticity of silicon sensor structures

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 260-262

  Nese, Martin ^a   Bernstein, Ralph W ^a   Johansen, Ib Rune ^a   Spooren, Rudie ^a  

^a SINTEF   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; COMPOSITION; EPOXY RESINS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HELIUM; LEAK DETECTION; NITROGEN OXIDES; PRESSURE EFFECTS; SILICON WAFERS;

ABSORBANCE; GAS CONCENTRATION MEASUREMENT; HERMETICITY TESTING; SILICON CAVITY; SILICON SENSOR STRUCTURES; WAFER BONDING;

SILICON SENSORS;

EID: 0029487256     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)