A method for elastic modulus measurements of magnetron sputtered thin films dedicated to mechanical applications

Thin Solid Films

Volumn 270, Issue 1-2, 1995, Pages 270-274

  Rouzaud, André ^a   Barbier, E ^a   Ernoult, J ^a   Quesnel, E ^a  

^a CEA GRENOBLE   (France)

Author keywords

Elastic properties; Physical vapour deposition; Sputtering

Indexed keywords

CARBON; CHROMIUM; COATINGS; ELASTIC MODULI; MAGNETRON SPUTTERING; MECHANICAL TESTING; MECHANICAL VARIABLES MEASUREMENT; NUMERICAL METHODS; STAINLESS STEEL; TITANIUM ALLOYS; TUNGSTEN; VAPOR DEPOSITION;

EQUATION DERIVATION; PHYSICAL VAPOR DEPOSITION; THREE POINT BENDING TEST;

THIN FILMS;

EID: 0029485123     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06921-6     Document Type: Article

References (13)

1. Mechanical Characterization of Thin Films by Micromechanical Techniques
2. Hard Coatings
3. Theories et Methodes de la Statistique TECHNIP