Near-field direct-write ultraviolet lithography and shear force microscopic studies of the lithographic process

Applied Physics Letters

Volumn 67, Issue , 1995, Pages 3859-

  Smolyaninov, Igor I ^a   Mazzoni, David L ^a   Davis, Christopher C ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FIBERS; MORPHOLOGY; OPTICAL MICROSCOPY; PHOTOCHEMICAL REACTIONS; PHOTORESISTS; SURFACES; ULTRAVIOLET RADIATION;

DIRECT WRITE LITHOGRAPHY; NEAR FIELD OPTICAL MICROSCOPY; SHEAR FORCE MICROSCOPY; UNCOATED TAPERED FIBERS;

LITHOGRAPHY;

EID: 0029483682     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115297     Document Type: Article

References (7)