Impact of minienvironments of facilities cost

Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 1995, Pages 286-291

  Barnett, William ^a   Schneider, Raymond K ^a  

^a FLUOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; CLEAN ROOMS; CMOS INTEGRATED CIRCUITS; COSTS; DESIGN; INDUSTRIAL MANAGEMENT; LOGIC DESIGN; MICROELECTRONIC PROCESSING; PERSONNEL; PRODUCTIVITY;

COST SAVINGS; FACILITY MODIFICATION; MINIENVIRONMENTS; PROCESS ISOLATION;

ELECTRONIC EQUIPMENT MANUFACTURE;

EID: 0029478666     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)