Cathodoluminesoent characteristics and light technical parameters of thin film screens based on oxides and oxysulfides of rare earth elements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2648, Issue , 1995, Pages 338-341

  Bondar, Vyacheslav ^a   Grytsiv, Myroslav ^a   Groodzinsky, Arkady ^a   Vasyliv, Mykhailo ^a  

^a IVAN FRANKO NATIONAL UNIVERSITY OF LVIV   (Ukraine)

Author keywords

Cathodoluminescence; Ion plasma technology; Thin films; Yttrium and lanthanum oxides and oxysulfides

Indexed keywords

ALUMINUM COMPOUNDS; CATHODOLUMINESCENCE; COLOR; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON IRRADIATION; ELECTRONS; LANTHANUM OXIDES; LUMINESCENCE; PHOSPHORS; RARE EARTH ELEMENTS; RARE EARTHS; SINGLE CRYSTALS; SUBSTRATES; TERBIUM COMPOUNDS; IONS; LANTHANUM COMPOUNDS; RADIATION EFFECTS; RARE EARTH COMPOUNDS; RESOLVING POWER; THIN FILMS; YTTRIUM COMPOUNDS;

COLOR CHANGES; ELECTRON BEAM ENERGY; ELECTRON PENETRATION DEPTH; HIGH-RESOLUTION SCREENS; ION PLASMAS; LUMINESCENCE COLOR; PHOSPHOR FILM; THIN FILM SINGLE CRYSTALS; ION-PLASMA TECHNOLOGY; OXYSULFIDES;

THIN FILMS; CATHODOLUMINESCENCE;

EID: 0029458778     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.226191     Document Type: Conference Paper

References (2)

1. S. Sella, J. C. Martin. "RF - sputtered luminescent rare earth and yttrium oxysulfide films", Thin Solid Films, Vol. 90, N2, pp. 181-185, 1982.
2. V. D. Bondar, M. Ya. Vasyliv, L. I. Veligura, M. Ya. Grytsiv, Ya. F. Kononets, A. B. Lyskovich. "Comparative characterization of obtaining methods for yttrium oxide dielectric and luminescent layers", Optoelektronika i poluprovodnikovaya tekhnika, Vol. 25, pp. 14-18, 1993 (in Russian).