A New Analytical Solution for the Load-Deflection of Square Membranes

Journal of Microelectromechanical Systems

Volumn 4, Issue 4, 1995, Pages 238-241

  Maier Schneider, Dieter ^a   Maibach, J ^a   Obermeier, Ernst ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELASTICITY; FINITE ELEMENT METHOD; LOADS (FORCES); MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MEMBRANES; PRESSURE EFFECTS; STRAIN; TENSILE STRENGTH; THIN FILMS;

LOAD DEFLECTION; SQUARE MEMBRANES;

MICROELECTROMECHANICAL DEVICES;

EID: 0029430046     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.475551     Document Type: Article

References (8)

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