Demonstration of Three-Dimensional Microstructure Self-Assembly

Journal of Microelectromechanical Systems

Volumn 4, Issue 4, 1995, Pages 170-176

  Green, P W ^a   Syms, R R A ^a   Yeatman, E M ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; RESIDUAL STRESSES; ROTATION; SEMICONDUCTING SILICON; SOLDERING ALLOYS; SURFACE TENSION; THREE DIMENSIONAL;

MICROSTRUCTURE ASSEMBLY; OUT OF PLANE ROTATION;

MICROELECTRONIC PROCESSING;

EID: 0029429892     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.475543     Document Type: Article

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