Plasma-activated high rate EB deposition of metals and oxides onto strip steel

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1995, Pages 401-409

  Schiller, S ^a   Hoetzsch, G ^a   Goedicke, K ^a   Zywitzki, O ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ELECTRON BEAMS; EVAPORATION; ION BEAMS; PLASMA APPLICATIONS; STEEL; STRIP METAL; THIN FILMS; TITANIUM;

ELECTRON BEAM SOURCES; ION BEAM ASSISTED DEPOSITION (IBAD); PLASMA ACTIVATION;

DEPOSITION;

EID: 0029428891     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)