Design, fabrication, modeling, and testing of a surface-micromachined micromirror device

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-2, Issue , 1995, Pages 981-988

  Michalicek, M Adrian ^a   Bright, Victor M ^a   Comtois, John H ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; INTERFEROMETRY; LASER APPLICATIONS; MATHEMATICAL MODELS; MATHEMATICAL TRANSFORMATIONS; MICROMACHINING; MIRRORS;

FLEXURE BEAM MICROMIRROR DEVICE (FBMD); PISTON STYLE DEVICE; SCHWARTZ-CHRISTOFFEL TRANSFORMATION;

LIGHT MODULATORS;

EID: 0029427324     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)