Improved electrolytic ionized water produced by a novel electrolytic cell for wet cleaning process

Conference Proceedings - Annual Semiconductor Pure Water and Chemicals Conference

Volumn , Issue , 1995, Pages 1-22

  Yamanaka, Koji ^a   Imaoka, Takashi ^a   Futatsuki, Takashi ^a   Iwamori, Tomoyuki ^a   Yamashita, Yukinari ^a   Yamasaki, Shinya ^a   Aoki, Hidemitsu ^a  

^a Japan Organo Co   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYSIS; ELECTROLYTES; ELECTROLYTIC CELLS; IMPURITIES; INTEGRATED CIRCUIT MANUFACTURE; IONIZATION OF LIQUIDS; SURFACE CLEANING; ULSI CIRCUITS; WATER;

ELECTROLYTIC IONIZED WATER; WAFER SURFACES; WET CLEANING METHOD;

INDUSTRIAL WATER TREATMENT;

EID: 0029424993     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)