Deep-UV excimer laser measurements at NIST

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2439, Issue , 1995, Pages 448-459

  Leonhardt, Rodney W ^a   Scott, Thomas R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CALORIMETERS; EXCIMER LASERS; INTEGRATED CIRCUIT MANUFACTURE; STANDARDS;

EXCIMER-LASER BASED MICROLITHOGRAPHY; LASER CALORIMETERS;

PHOTOLITHOGRAPHY;

EID: 0029424824     PISSN: 0277786X     EISSN: None     Source Type: None    
DOI: 10.1117/12.209229     Document Type: Conference Paper

References (11)