Surface micromachined angular accelerometer with force feedback

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-2, Issue , 1995, Pages 941-947

  Brosnihan, T J ^a   Pisano, A P ^a   Howe, R T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION MEASUREMENT; ACCELEROMETERS; FEEDBACK CONTROL; FORCE MEASUREMENT; INTEGRATED CIRCUITS; MICROMACHINING; SENSORS; SILICON;

ANGULAR ACCELEROMETERS; FOLDED BEAM SUSPENSIONS; FORCE FEEDBACK; PARALLEL PLATE CAPACITIVE PICKOFFS; POLYSILICON INERTIAL WHEELS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029424510     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)