Thyratron modulators in plasma source ion implantation

Digest of Technical Papers-IEEE International Pulsed Power Conference

Volumn 2, Issue , 1995, Pages 1243-1248

  Adler, R J ^a   Scheuer, J ^a   Horne, W ^a  

^a Ionatron   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA SOURCE ION IMPLANTATION;

ION IMPLANTATION; PLASMA SOURCES; THYRATRONS;

MODULATORS;

EID: 0029423596     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)