Design and control of a six degree-of-freedom magnetic/fluidic motion control stage

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-1, Issue , 1995, Pages 511-518

  Ludwick, Stephen J ^a   Trumper, David L ^a   Holmes, Michael L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; CONTROL NONLINEARITIES; DAMPING; DEGREES OF FREEDOM (MECHANICS); DIGITAL CONTROL SYSTEMS; FEEDBACK CONTROL; FLUIDIC DEVICES; POSITION CONTROL; PROPORTIONAL CONTROL SYSTEMS; REAL TIME SYSTEMS;

ANGSTROM STAGE; MAGNETIC ACTUATORS; MAGNETIC/FLUIDIC MOTION CONTROL STAGE;

MOTION CONTROL;

EID: 0029422663     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)