Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler

Wear

Volumn 190, Issue 1, 1995, Pages 76-88

  Poon, Chin Y ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

Comparison of surface problem; Glass ceramic thin film disk substrate; Sampling interval; Scan size; Stylus size

Indexed keywords

ATOMIC FORCE MICROSCOPY; CERAMIC MATERIALS; GLASS; SAMPLING; SURFACE ROUGHNESS; THIN FILM DEVICES;

COMPARISON OF SURFACE PROFILERS; GLASS CERAMIC THIN FILM DISK SUBSTRATE; NONCONTACT OPTICAL PROFILER; SAMPLING INTERVAL; SCAN SIZE; STYLUS PROFILER; STYLUS SIZE; TIP RADIUS;

SURFACE MEASUREMENT;

EID: 0029409945     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/0043-1648(95)06697-7     Document Type: Article

References (30)

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