SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 76-77, Issue , 1995, Pages 167-173

Formation of metal oxides by cathodic arc deposition

(7) Anders, S a Anders, A a Rubin, M a Wang, Z a Raoux, S a Kong, F a Brown, I G a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Cathodic arc deposition; Oxide formation

Indexed keywords

ADHESION; CATHODES; CORROSION RESISTANCE; HEAT TRANSFER; INTEGRATED OPTOELECTRONICS; METALS; MULTILAYERS; OXIDES; PLASMA SOURCES; SYNTHESIS (CHEMICAL); THIN FILMS; VACUUM APPLICATIONS;

ACTIVE OPTOELECTRONIC INTEGRATED DEVICES; CATHODIC ARC DEPOSITION; ELECTROCHROMIC FILMS; HIGH METAL ION ENERGY; MACROPARTICLE FILTERS; METAL OXIDES; OXIDE FORMATION;

DEPOSITION;

EID: 0029407349 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/0257-8972(95)02508-1 Document Type: Article

Times cited : (58)

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