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Volumn 341, Issue 1-2, 1995, Pages 92-102
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The interaction of azomethane with Si(100)
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Author keywords
Chemical vapor deposition; Chemisorption; Compound formation; Molecule solid reactions; Photoemission; Silicon; Thermal desorption
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CHEMISORPTION;
DECOMPOSITION;
DESORPTION;
NITRIDES;
ORGANIC COMPOUNDS;
PHOTOEMISSION;
SILICON;
SILICON CARBIDE;
SURFACES;
X RAY PHOTOELECTRON SPECTROSCOPY;
AZOMETHANE;
COMPOUND FORMATION;
HYDROGEN CYANIDE;
METHYLAMINE;
MOLECULE-SOLID REACTIONS;
THERMAL DESORPTION TECHNIQUES;
ADSORPTION;
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EID: 0029405868
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/0039-6028(95)00752-0 Document Type: Article |
Times cited : (16)
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References (24)
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