SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 76-77, Issue , 1995, Pages 159-166

Multilayered titanium tungsten nitride coatings with a superlattice structure grown by unbalanced magnetron sputtering

(5) Hurkmans, T a Trinh, T a Lewis, D B a Brooks, J S a Munz W D a,b

a Hauzer Techno Coating BV (Netherlands)

b SHEFFIELD HALLAM UNIVERSITY (United Kingdom)

Author keywords

Hard coatings; Multilayers; Sputtering; Superlattice; Titanium tungsten nitride

Indexed keywords

ADHESION; CRYSTAL ORIENTATION; HARDNESS; MAGNETRON SPUTTERING; MAGNETRONS; MICROSTRUCTURE; MULTILAYERS; NITROGEN; SPUTTER DEPOSITION; SUPERLATTICES; TITANIUM NITRIDE; X RAY DIFFRACTION;

HARD COATINGS; NITROGEN PARTIAL PRESSURE; PREFERRED ORIENTATION; REACTIVE GAS ATMOSPHERE; SATELLITE ROTATION FREQUENCY; TITANIUM TUNGSTEN NITRIDE; UNBALANCE MAGNETRON SPUTTER DEPOSITION;

INORGANIC COATINGS;

EID: 0029405525 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/0257-8972(95)02596-0 Document Type: Article

Times cited : (40)

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