Fabrication of photonic band-gap crystals

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 6, 1995, Pages 2696-2700

  Cheng, C C ^a   Scherer, A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; LIGHT TRANSMISSION; MASKS; OPTICAL VARIABLES MEASUREMENT; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM COMPOUNDS; SILICA; SPECTRUM ANALYZERS;

ANGLE ETCHING; CHEMICALLY ASSISTED ION BEAM ETCHING; GALLIUM ARSENIC PHOSPHIDE; MICROFABRICATION; PATTERN TRANSFER; PHOTONIC CRYSTALS;

CRYSTALS;

EID: 0029405339     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588051     Document Type: Article

References (13)