Excimer laser processing of indium-tin-oxide films: An optical investigation

Journal of Applied Physics

Volumn 78, Issue 10, 1995, Pages 6211-6219

  Szorenyi T ^a   Laude, L D ^a   Bertoti I ^b   Kantor Z ^c   Geretovszky, Zs ^c  

^a UNIVERSITY OF MONS   (Belgium)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c RESEARCH GROUP ON LASER PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CALCULATIONS; ELECTRIC CONDUCTIVITY MEASUREMENT; EXCIMER LASERS; FINITE DIFFERENCE METHOD; LASER ABLATION; LASER BEAM EFFECTS; OPTICAL PROPERTIES; OXYGEN; SEMICONDUCTING INDIUM COMPOUNDS; TEMPERATURE DISTRIBUTION; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRONIC DEFECTS; GAUSSIAN DECONVOLUTION; INDIUM TIN OXIDE; LASER FLUENCE;

SEMICONDUCTING FILMS;

EID: 0029404733     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360567     Document Type: Article

References (0)