Process Complexity of Magnetoresistive Sensors: A Review

IEEE Transactions on Magnetics

Volumn 31, Issue 6, 1995, Pages 2579-2584

  Fontana, Robert E ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CURRENTS; FABRICATION; LINEARIZATION; MAGNETIC FIELDS; MAGNETIC HEADS; MAGNETIC MATERIALS; MAGNETIC THIN FILMS; MAGNETIZATION; PHOTOLITHOGRAPHY; PROCESS ENGINEERING; SENSORS;

ION MILLING; MAGNETORESISTIVE SENSORS; METAL LAYER DEPOSITION; OUTPUT SIGNAL CHARACTERISTICS; PATTERNING; PROCESS COMPLEXITY; SENSOR DESIGN; THIN FILM PROCESSING TECHNOLOGY;

MAGNETIC THIN FILM DEVICES;

EID: 0029403856     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.490062     Document Type: Article

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