8 x 8 Array of Thin-Film Photodetectors Vertically Electrically Interconnected to Silicon Circuitry

IEEE Photonics Technology Letters

Volumn 7, Issue 10, 1995, Pages 1168-1170

  Fike, S M ^a   Buchanan, B ^a   Jokerst, N M ^a   Brooke, M A ^a   Morris, T G ^a   DeWeerth, S P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; IMAGE PROCESSING; OSCILLATORS (ELECTRONIC); PHOTODETECTORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL PROCESSING; SUBSTRATES; THIN FILMS; THREE DIMENSIONAL;

ALUMINUM GALLIUM ARSENIDE; EPITAXIAL LIFT OFF; SILICON OSCILLATOR ARRAY CIRCUIT; THIN FILM PHOTODETECTORS; VERTICAL ELECTRICAL INTERCONNECTIONS;

INTEGRATED OPTOELECTRONICS;

EID: 0029393508     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/68.466579     Document Type: Article

References (5)

1. For a review of results see the “Special issue on solid state image sensors,” IEEE Trans. Electron. Dev., vol. 38, 1991.
2. E. Yablonovich, T. J. Gmitter, J. P. Harbison, and R. Bhat, “Double heterostructure GaAs/AlGaAs thin film diode lasers on glass substrates,” IEEE Photon. Technol. Lett., vol. 1, pp. 41-42, 1989.
3. C. Camperi-Ginestet, M. Hargis, N. Jokerst, and M. Allen, “Alignable epitaxial lift-off of GaAs materials with selective deposition using polyimide diaphragms,” IEEE Photon. Technol. Lett., vol. 3, pp. 1123–1126, 1991.
4. K. W. Goossen, J. A. Walker, L. A. D'Asaro, S. P. Hui, B. Tseng, R. Leibenguth, D. Kossives, D. D. Bacon, D. Dahringer, L. M. F. Chirovsky, A. L. Lentine, and D. A. B. Miller, “GaAs MQW modulators integrated with silicon CMOS,” IEEE Photon. Technol. Lett., vol. 7, pp. 360-362. 1995.
5. C. Camperi-Ginestet, Y. W. Kim, N. M. Jokerst, M. G. Allen, and M. A. Brooke, “Vertical electrical interconnection of compound semiconductor thin-film devices to underlying silicon circuitry,” IEEE Photon. Technol. Lett., vol. 4, pp. 1003–1006, 1992.