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Volumn 10, Issue 10, 1995, Pages 1418-1422
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Combined Raman and luminescence assessment of epitaxial 6H-SiC films grown on 6H-SiC by low pressure vertical chemical vapour deposition [2]
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Author keywords
[No Author keywords available]
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Indexed keywords
HOMOEPITAXIAL STRUCTURES;
LOW PRESSURE VERTICAL CHEMICAL VAPOR DEPOSITION;
SILICON CARBIDE FILMS;
CHEMICAL VAPOR DEPOSITION;
EPITAXIAL GROWTH;
PHOTOLUMINESCENCE;
RAMAN SCATTERING;
SEMICONDUCTING FILMS;
SEMICONDUCTING SILICON COMPOUNDS;
SUBSTRATES;
THIN FILMS;
SILICON CARBIDE;
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EID: 0029386513
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/10/10/018 Document Type: Letter |
Times cited : (5)
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References (34)
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