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Volumn 10, Issue 10, 1995, Pages 1418-1422

Combined Raman and luminescence assessment of epitaxial 6H-SiC films grown on 6H-SiC by low pressure vertical chemical vapour deposition [2]

Author keywords

[No Author keywords available]

Indexed keywords

HOMOEPITAXIAL STRUCTURES; LOW PRESSURE VERTICAL CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE FILMS;

EID: 0029386513     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/10/10/018     Document Type: Letter
Times cited : (5)

References (34)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.