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Volumn 74-75, Issue PART 1, 1995, Pages 375-381
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Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD
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Author keywords
Cermets; Hard coatings; PACVD; Plasma diagnostics; Wear resistance
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Indexed keywords
CERMETS;
COMPOSITION;
CRYSTAL STRUCTURE;
HARDNESS;
MATERIALS TESTING;
MULTILAYERS;
PLASMA APPLICATIONS;
STEEL;
SYNTHESIS (CHEMICAL);
TITANIUM CARBIDE;
TITANIUM NITRIDE;
WEAR OF MATERIALS;
CERMET CUTTING TOOL;
COATED CERMET TOOL;
MILLING TEST;
PLASMA-ASSISTED CHEMICAL VAPOUR DEPOSITION;
TOP LAYER;
CHEMICAL VAPOR DEPOSITION;
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EID: 0029375638
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(95)08243-3 Document Type: Article |
Times cited : (46)
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References (18)
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