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Journal of the American Ceramic Society

Volumn 78, Issue 9, 1995, Pages 2412-2416

Characterization of Optical Thin Films by Spectroscopic Ellipsometry

(4) Trolier‐McKinstry, Susan a Chindaudom, Pong a Vedam, Kuppuswami a Hiremath, Basavaraj V b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; DIELECTRIC FILMS; ELLIPSOMETRY; GLASS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SILICA; SUBSTRATES; TANTALUM COMPOUNDS;

DIELECTRIC COATINGS; SPECTROSCOPIC ELLIPSOMETRY; TANTALUM OXIDE;

THIN FILMS;

EID: 0029373976 PISSN: 00027820 EISSN: 15512916 Source Type: Journal
DOI: 10.1111/j.1151-2916.1995.tb08678.x Document Type: Article

Times cited : (7)

References (20)

1
- 0021513002
- Multiple Determination of the Optical Properties of Thin‐Film Coating Materials
- (1984) Appl. Opt. , vol.23 , pp. 3571-3596
- Arndt, D.P.¹ Azzam, R.M.A.² Bennett, J.M.³ Borgogno, J.P.⁴ Carniglia, C.K.⁵ Case, W.E.⁶ Dobrowolski, J.A.⁷ Gibson, U.J.⁸ Hart, T.T.⁹ Ho, F.C.¹⁰ Hodgkin, V.A.¹¹ Klapp, W.P.¹² Macleod, H.A.¹³ Pelletier, E.¹⁴ Purvis, M.K.¹⁵ Quinn, D.M.¹⁶ Strome, D.H.¹⁷ Swenson, R.¹⁸ Temple, P.A.¹⁹ Thon, T.F.²⁰ more..

2
- 85072603869
- Microstructure of Optical Thin Films
- (1982) Proc. SPIE-Int. Soc. Opt. Eng. , vol.325 , pp. 21-26
- Macleod, H.A.¹

3
- 0021515230
- Physical and Chemical Aspects in the Application of Thin Films on Optical Elements
- (1984) Appl. Opt. , vol.23 , Issue.20 , pp. 3612-3632
- Guenther, K.H.¹

4
- 0020845427
- Microstructure of Vapor‐Deposited Optical Coatings
- (1984) Applied Optics , vol.23 , Issue.21 , pp. 3806-3816
- Guenther, K.H.¹

5
- 84986425470
- “Characterization of Inhomogeneous Transparent Thin Films on Transparent Substrates by Spectroscopic Ellipsometry”; Ph.D. Thesis., The Pennsylvania State University, University Park, PA
- (1991)
- Chindaudom, P.¹

6
- 77953359349
- Toward Quantification of Thin‐Film Morphology
- (1986) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.4 A , Issue.3 , pp. 490-495
- Messier, R.¹

7
- 84975617917
- Thin‐Film Optical Coatings
- Academic Press, New York
- (1987) Applied Optics and Optical Engineering , vol.10 , pp. 1-68
- Macleod, H.A.¹

8
- 43949164322
- Studies on Inhomogeneous Transparent Optical Coatings on Transparent Substrates by Spectroscopic Ellipsometry
- (1993) Thin Solid Films , vol.234 , pp. 439-442
- Chindaudom, P.¹ Vedam, K.²

9
- 0027687271
- Determination of the Optical Function n(λ) of Vitreous Silica by Spectroscopic Ellipsometry with an Achromatic Compensator
- (1993) Appl. Opt. , vol.32 , Issue.31 , pp. 6391-6397
- Chindaudom, P.¹ Vedam, K.²

10
- 0016072602
- Effects of Component Optical Activity in Data Reduction and Calibration of Rotating‐Analyzer Ellipsometers
- (1974) J. Opt. Soc. Am. , vol.64 , Issue.6 , pp. 812-819
- Aspnes, D.E.¹

11
- 0016425448
- High‐Precision Scanning Ellipsometer
- (1975) Appl. Opt. , vol.14 , Issue.1 , pp. 220-228
- Aspnes, D.E.¹ Studna, A.A.²

12
- 84975539429
- 3 Thin Film on Transparent Substrate by Spectroscopic Ellipsometry
- (1992) Opt. Lett. , vol.17 , pp. 533-540
- Chindaudom, P.¹ Vedam, K.²

13
- 84931505041
- Systematic and Random Errors in Rotating‐Analyzer Ellipsometry
- (1988) Journal of the Optical Society of America A , vol.5 , Issue.6 , pp. 773-781
- de Nijs, J.M.M.¹ van Silfhout, A.²

14
- 2142718793
- Ellipsometry Applied to Films on Dielectric Substrates
- (1969) Surf. Sci. , vol.16 , pp. 288-302
- King, R.J.¹ Downs, M.J.²

15
- 0000416414
- Interspecimen Comparison of the Refractive Index of Fused Silica
- (1965) Journal of the Optical Society of America , vol.55 , pp. 1205
- Malitson, I.H.¹

16
- 0000294541
- Optical Characterization of Inhomogeneous Transparent Films on Transparent Substrates by Spectroscopic Ellipsometry
- (1994) Phys. Thin Films , vol.19 , pp. 191-247
- Chindaudom, P.¹ Vedam, K.²

17
- 0021369831
- 2 Polymorphs
- (1984) Phys. Chem. Miner. , vol.10 , pp. 133-136
- Maj, S.¹

18
- 84986342458
- 3 Multilayer Systems Produced by rf Reactive Sputtering
- Edited by, E. Broszeit, W. D. Munz, H. Oechsner, K. T. Rie, G. K. Wolf, Verlag, Weinheim, Germany
- (1989) Plasma Surface Engineering
- Zemlicka, J.¹ Jastrabik, L.² Zelezny, V.³ Bohac, P.⁴

19
- 0025596133
- Comparison of Different Technologies for High‐Quality Optical Coatings
- (1990) Proc. SPIE-Int. Soc. Opt. Eng. , vol.1270 , pp. 127-183
- Flory, F.¹

20
- 84986343769
- “Characterization of Ferroelectric Surfaces and Thin Films by Spectroscopic Ellipsometry”; Ph.D. Thesis., The Pennsylvania State University, University Park, PA
- (1992)
- McKinstry, S.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.