Microcontact Printing of Octadecylsiloxane on the Surface of Silicon Dioxide and Its Application in Microfabrication

Journal of the American Chemical Society

Volumn 117, Issue 37, 1995, Pages 9576-9577

  Xia, Younan ^a   Mrksich, Milan ^a   Kim, Enoch ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; POLYMETHYL METHACRYLATES; PRINTING; SEMICONDUCTING SILICON; SILICA; SURFACES;

MICROCONTACT PRINTING; MICROFABRICATION; OCTADECYLSILOXANE;

MICROELECTRONICS;

EID: 0029370682     PISSN: 00027863     EISSN: 15205126     Source Type: Journal    
DOI: 10.1021/ja00142a031     Document Type: Article

References (14)

1. Wilbur, J.L.; Kumar, A.; Kim, E.; Whitesides, G.M. Adv. Mater. 1994. 6, 600—604.
2. Dubois, L.H.; Nuzzo. R.G. Annu. Rev. Phys. Chem. 1992, 43, 437-463.
3. Kumar. A.: Biebuyck. H.; Whitesides. G.M. Langmuir 1994, 10, 1498–1511.
4. Xia, Y.; Whitesides. G.M. J. Am. Chem. Soc. 1995. 117, 3274–3275.
5. McGoven, M.E.; Kallury, K.M.; Thompson. M. Langmuir 1994. 10, 3607—3614.
6. Parikh, A.N.; Allara, D.L.; Azouz, I.B.: Rondelez. F. J. Phys. Chem. 1994, 98, 7577–7590.
7. Wasserman, S.R.; Tao, Y.-T.; Whitesides, G.M. Langmuir 1989. 5, 1074–1078.
8. Lopez, G.P.: Biebuyck, H.A.; Friesbie, D.C.; Whitesides, G.M. Science 1993, 260, 647–649.
9. Biebuyck, H.: Whitesides. G.M. Langmuir 1994, 10, 4581—4587.
10. Kim, E.; Kumar, A.; Whitesides, G.M. J. Electrochem. Soc. 1995, 142, 628–633.
11. Biebuyck. H.; Whitesides. G.M. Langmuir 1994, 10, 2790–2793.
12. Peterson, K.E. Proc. IEEE 1982. 70, 400–424.
13. Calvert, J.M.; Dulcy, C.S.; Peckerar. M.C.; Schnur, J.M.; Georger, J.H., Jr.; Calabrese, G.S.; Sricharoenchaikit, P. Solid State Technol. 1991, October, 77-82.
14. Jackman, R.; Wilbur, J.L.; Whitesides, G.M. Science 1995, 269, 664-666.