Influences of humidity and moisture on the long-term stability of piezoresistive pressure sensors

Measurement

Volumn 16, Issue 1, 1995, Pages 21-29

  Nakladal, Arne ^a   Sager, Karsten ^a   Gerlach, Gerald ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Humidity and moisture; Instabilities; Measuring errors; Piezoresistive sensors

Indexed keywords

ATMOSPHERIC HUMIDITY; MEASUREMENT ERRORS; MOISTURE; PIEZOELECTRIC DEVICES; PRESSURE MEASUREMENT; RELAXATION PROCESSES;

OUTPUT SIGNAL STABILITY; PIEZORESISTIVE PRESSURE SENSORS; UNENCAPSULATED SILICON SENSORS;

SILICON SENSORS;

EID: 0029369502     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/0263-2241(95)00014-C     Document Type: Article

References (4)

1. Temperature sensitivity in silicon piezoresistive pressure transducers
2. Design and technology of piezoresistive miniaturized pressure sensor IBW 88
3. The biomedical pressure sensor IBW 88
4. A multi-step humidity source for investigation of semiconducting structures