Measurement of High-Frequency Dielectric Characteristics in the mm-Wave Band for Dielectric Thin Films on Semiconductor Substrates

Japanese Journal of Applied Physics

Volumn 34, Issue 9, 1995, Pages L1211-L1213

  Ikuta, Kenji ^a   Umeda, Yohtaro ^a   Ishii, Yasunobu ^a  

^a NTT CORPORATION   (Japan)

Author keywords

High frequency characteristics; Ielectric thin films; Semiconductor substrates; Stray correction; Thin film capacitors

Indexed keywords

CAPACITORS; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC NETWORK ANALYZERS; ELECTRIC VARIABLES MEASUREMENT; FREQUENCIES; MILLIMETER WAVES; PERMITTIVITY; STRAY LIGHT; SUBSTRATES; THIN FILM DEVICES;

DIELECTRIC LOSS; DIELECTRIC THIN FILMS; HIGH FREQUENCY CHARACTERISTICS; MILLIMETER WAVEBAND; SEMICONDUCTOR SUBSTRATES; STRAY EFFECT CORRECTION; THIN FILM CAPACITORS;

DIELECTRIC FILMS;

EID: 0029369437     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.34.L1211     Document Type: Article

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