Analysis of the Resistance Degradation of SrTiO3 and BaxSr(1-x)TiO3 Thin Films

Japanese Journal of Applied Physics

Volumn 34, Issue 9, 1995, Pages 5245-5249

  Numata, Ken ^a   Fukuda, Yukio ^a   Aoki, Katsuhiro ^a   Nishimura, Akitoshi ^a  

^a Texas Instruments Japan Ltd   (Japan)

Author keywords

BST; Oxygen vacancies; Resistance degradation; Sputtering; ST; Thin film

Indexed keywords

BARIUM TITANATE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC FIELD EFFECTS; ELECTRIC RESISTANCE; ELECTRODES; GOLD; INTERFACES (MATERIALS); LEAKAGE CURRENTS; PLATINUM; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

BARIUM STRONTIUM TITANATE THIN FILMS; OXYGEN VACANCIES; RESISTANCE DEGRADATION; STRONTIUM TITANATE THIN FILMS;

FERROELECTRIC MATERIALS;

EID: 0029368986     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.34.5245     Document Type: Article

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