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Volumn 60, Issue 2, 1995, Pages 311-323
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Measurement of low-order structure factors for silicon from zone-axis CBED patterns
a a b c c c |
Author keywords
[No Author keywords available]
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Indexed keywords
AUTOMATION;
CALCULATIONS;
CHARGE COUPLED DEVICES;
COMPUTER SIMULATION;
DETECTORS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
IMAGE ANALYSIS;
SILICON;
THICKNESS MEASUREMENT;
TRANSMISSION ELECTRON MICROSCOPY;
X RAYS;
AUTOMATED PATTERN MATCHING;
CCD DETECTORS;
DATA EXTRACTION;
ENERGY FILTERS;
INTENSITIES;
LOW-ORDER STRUCTURE FACTORS;
METHOD OF EXTRACTING;
PATTERN ANALYSIS;
X-RAY MEASUREMENT;
ELECTRON DIFFRACTION;
ARTICLE;
ELECTRON DIFFRACTION;
ELECTRON MICROSCOPY;
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EID: 0029360401
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/0304-3991(95)00058-1 Document Type: Article |
Times cited : (58)
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References (18)
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