Hardness measurements of thin films-determining the critical ratio of depth to thickness using FEM

Thin Solid Films

Volumn 264, Issue 1, 1995, Pages 59-71

  Cai, X ^a   Bangert, H ^b  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Adhesion; Coatings; Tribology

Indexed keywords

ADHESION; COATINGS; FINITE ELEMENT METHOD; HARDNESS; MECHANICAL VARIABLES MEASUREMENT; PLASTIC DEFORMATION; SUBSTRATES; TRIBOLOGY;

HARDNESS MEASUREMENT; INDENTATION PROCESS;

THIN FILMS;

EID: 0029356712     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06569-5     Document Type: Article

References (19)

1. Mechanical property and structure relationships in hard coatings for cutting tools
2. A review of the present state of art in hard coatings grown from the vapor phase
3. Distinguishing thin film and substrate contributions in microindentation hardness measurements
4. Proc. Silicon Nitride '93