Fluidic self-assembly of InGaAs vertical cavity surface emitting lasers onto silicon

Electronics Letters

Volumn 31, Issue 17, 1995, Pages 1448-1449

  Tu, J K ^a   Talghader, J J ^a   Smith, J S ^a   Hadley, M A ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Beckmen Display ^*  (United States)

Author keywords

Packaging; Vertical cavity surface emitting lasers

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; ELECTRIC CURRENTS; ELECTRONICS PACKAGING; ETCHING; LASER PULSES; METALLIZING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; SILICON; SUBSTRATES;

FLUIDIC SELF ASSEMBLY; PLANARIZING; THERMAL SHIFT; THRESHOLD CURRENTS; TURN ON VOLTAGE; VERTICAL CAVITY SURFACE EMITTING LASERS;

LASERS;

EID: 0029354571     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19950989     Document Type: Article

References (7)

1. LEAR, K. L., CHOQUETTE, K.D., SCHNEIDER. R.P., KILCOYNE, S.P., and GELB, K.M.: ‘Selectively oxidised vertical cavity surface emitting lasers with 50% power conversion efficiency’, Electron. Lett., 1995, 30, pp. 208-209
2. YEH, H.-J.J., and SMITH, J.S.: ‘Fluidic self-assembly of GaAs microstructures on Si substrates’. Sens. Mater., 1994, 6, pp. 319-332
3. VERMA, A.K., HADLEY, M.A., and SMITH, J.S.: ‘Fluidic self-assembly of silicon microstructures’. Proc. 45th Electronic Components and Technology Conf., Las Vegas. Nevada, USA. 1995. pp. 1263-1268
4. YEH. H.-J.J., and SMITH, J.S.: ‘Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates’. IEEE Photonics Technol. Lett., 1994. 6. pp. 706-708
5. TU, J.K., YEH. H.-J.J., and SMITH, J.S.: ‘InGaAs and GaAs p-i-n photodetectors integrated onto a Si substrate by fluidic self-assembly’. CLEO/IQEC'94. Anaheim, CA. USA. 1994. Paper CThI39
6. TALGHADER, J.J., TL, J.K., and SMITH, J.S.: ‘Integration of fluidically self-assembled optoelectronic devices using a silicon-based process’, submitted to IEEE Photonics Technol. Lett
7. TALGHADER, J.J., HADLEY, M.A., and SMITH, J.S.: ‘Molecular beam epitaxy growth method for vertical-cavity surface-emitting laser resonators based on substrate thermal emission’. To be published