Characterization of a cantilever with an integrated deflection sensor

Thin Solid Films

Volumn 264, Issue 2, 1995, Pages 159-164

  Linnemann, R ^a   Gotszalk, T ^a   Hadjiiski, L ^a   Rangelow, I W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Atomic force microscopy; Cantilever; Deflection sensor; Piezoresistive detection system; Sensitivity

Indexed keywords

ELECTRIC MEASURING BRIDGES; OPTICAL RESOLVING POWER; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SILICON SENSORS; SURFACE STRUCTURE; THERMAL EFFECTS;

CANTILEVERS; DEFLECTION SENSOR; PIEZORESISTIVE DETECTION SYSTEM; WHEATSTONE BRIDGE PIEZO LEVER;

ATOMIC FORCE MICROSCOPY;

EID: 0029352255     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)05829-6     Document Type: Article

References (13)

1. Atomic force microscope
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