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Volumn 42, Issue 7, 1995, Pages 1386-1388

Thermal Simulation of Thin-Film Interconnect Failure Caused by High Current Pulses

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CURRENT DENSITY; GATES (TRANSISTOR); MATHEMATICAL MODELS; PASSIVATION; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS; THIN FILM DEVICES;

EID: 0029345169     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.391228     Document Type: Article
Times cited : (10)

References (11)
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  • 2
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    • Dielectric based antifuse for logic and memory ICs
    • E. Hamdy et al., “Dielectric based antifuse for logic and memory ICs,” in IEDM Tech. Dig., 1988, pp. 786–789.
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  • 3
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    • A novel double-metal structure for voltage-programmable links
    • S. S. Cohen, J. I. Raffel, and P. W. Wyatt, “A novel double-metal structure for voltage-programmable links,” IEEE Electron Device Lett., vol. 13, pp. 488–490, 1992.
    • (1992) IEEE Electron Device Lett. , vol.13 , pp. 488-490
    • Cohen, S.S.1    Raffel, J.I.2    Wyatt, P.W.3
  • 4
    • 0027685138 scopus 로고
    • Short-time failure of metal interconnect caused by current pulses
    • J. E. Murguia and J. B. Bernstein, “Short-time failure of metal interconnect caused by current pulses,” IEEE Electron Device Lett., vol. 14, pp. 481–483, 1993.
    • (1993) IEEE Electron Device Lett. , vol.14 , pp. 481-483
    • Murguia, J.E.1    Bernstein, J.B.2
  • 5
    • 0343367760 scopus 로고
    • Three-dimensional thermal analysis of high density triple-level interconnection structures in very large scale integrated circuits
    • X. Gui, S. K. Dew, and M. J. Brett, “Three-dimensional thermal analysis of high density triple-level interconnection structures in very large scale integrated circuits,” J. Vac. Sci. Technol. B, vol. 12, pp. 59–62, 1994.
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  • 6
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    • Use of the three-dimensional TLM method in the thermal design and simulation of semiconductor devices
    • X. Gui, P. W. Webb, and G. B. Gao, “Use of the three-dimensional TLM method in the thermal design and simulation of semiconductor devices,” IEEE Trans. Electron Devices, vol. 39, pp. 1295–1302, 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , pp. 1295-1302
    • Gui, X.1    Webb, P.W.2    Gao, G.B.3
  • 7
    • 0026866361 scopus 로고
    • An error parameter in TLM diffusion modelling
    • X. Gui, P. W. Webb, and D. de Cogan, “An error parameter in TLM diffusion modelling,” Int. J. Numer. Model., vol. 5, pp. 129–137, 1992.
    • (1992) Int. J. Numer. Model. , vol.5 , pp. 129-137
    • Gui, X.1    Webb, P.W.2    de Cogan, D.3
  • 8
    • 84993910297 scopus 로고
    • Implementation of timestep changes in transmission-line matrix diffusion modelling
    • P. W. Webb and X. Gui, “Implementation of timestep changes in transmission-line matrix diffusion modelling,” Int. J. Numer. Model., vol. 5, pp. 251–257, 1992.
    • (1992) Int. J. Numer. Model. , vol.5 , pp. 251-257
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  • 9
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    • Dynamic fracture test of metal thin films deposited on an insulating substrate by a high current pulse method
    • K. Y. Kim and W. Sachse, “Dynamic fracture test of metal thin films deposited on an insulating substrate by a high current pulse method,” Thin Solid Films, vol. 205, pp. 176–181, 1991.
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    • Kim, K.Y.1    Sachse, W.2
  • 10
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    • Simulation of the effect of thin film microstructure on current and temperature distributions in very large scale integrated metallization structures
    • T. Smy, D. J. Reny, and M. J. Brett, “Simulation of the effect of thin film microstructure on current and temperature distributions in very large scale integrated metallization structures,” J. Vac. Sci. Technol. B, vol. 10, pp. 2267–2276, 1992.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.