Surface-science aspects of vacuum microelectronics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 4, 1995, Pages 1391-1410

  Schwoebel, P R ^a   Brodie, I ^a  

^a SRI INTERNATIONAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CURRENT DENSITY; DEPOSITION; DESORPTION; DIFFUSION; ION BOMBARDMENT; PASSIVATION; PHOSPHORS; SPURIOUS SIGNAL NOISE; SURFACES; THIN FILMS; VACUUM APPLICATIONS;

CATHODE BOMBARDMENT; CURRENT DENSITY LIMITS; EMISSION NOISE; FLAT-PANEL DISPLAYS; SURFACE SCIENCE; THERMIONIC EMISSION; THIN FILM GROWTH; VACUUM COMPONENTS; VACUUM DEVICES; VOLTAGE BREAKDOWN;

MICROELECTRONICS;

EID: 0029344489     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588219     Document Type: Article

References (116)