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Volumn 7, Issue 7, 1995, Pages 649-652

Lithographic molding: A convenient route to structures with sub‐micrometer dimensions

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ETCHING; FILMS; HEATING; MONOLAYERS; PHOTOLITHOGRAPHY; PLASTIC MOLDS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SILICONES;

EID: 0029342101     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.19950070710     Document Type: Article
Times cited : (89)

References (28)
  • 12
    • 84987437482 scopus 로고    scopus 로고
    • The PDMS was SYLGARD silicone elastomer 184 (Dow–Corning Corpo–ration).
  • 13
    • 84987428592 scopus 로고    scopus 로고
    • 11.12After removal from the solution of alkyltrichlorosilane, the sample was washed repeatedly with heptane, deionized water and ethanol, then dried in a stream of N2 gas. PDMS was poured over the master, degassed under vacuum for 45 min, and cured at 60°C for 2h. After curing, the elastomer was peeled gently from the surface of the silicon. The silicon master could be used again to mold another PDMS stamp.
  • 20
    • 84987451401 scopus 로고    scopus 로고
    • Atomic force microscopy (AFM) was performed with a Topometrix TMX 2010 scanning probe microscope (Mountain View, CA). A cantilever fab– ricated from silicon nitride, in constant contact with the surface, scanned a silicon nitride tip (tip radius∼1000Å) across the substrate at a constant rate (∼10–50 pm/s) and with a constant force (∼0.1 nN). A silicon nitride „super–tip” (tip radius = 100Å ) was also used to verify that the resolution of the scale of features observed was not limited by the (larger) radius of curvature of a standard tip.
  • 23
    • 84987388791 scopus 로고    scopus 로고
    • Cured Sylgard 184 silicon elastomer has a Durometer (Shore A, a measure of the hardness of the bulk material) of 35 points. We did not explore other elastomers.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.