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Volumn 7, Issue 7, 1995, Pages 649-652
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Lithographic molding: A convenient route to structures with sub‐micrometer dimensions
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Author keywords
[No Author keywords available]
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Indexed keywords
ELASTOMERS;
ETCHING;
FILMS;
HEATING;
MONOLAYERS;
PHOTOLITHOGRAPHY;
PLASTIC MOLDS;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SILICONES;
ANISOTROPIC ETCHING;
FLASTOMERIC STAMP;
GOLD FILM;
LITHOGRAPHIC MOLDING;
MICROCONTACT PRINTING;
PATTERNED SELF ASSEMBLED MONOLAYER;
POLYDIMETHYLSILOXANE;
LITHOGRAPHY;
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EID: 0029342101
PISSN: 09359648
EISSN: 15214095
Source Type: Journal
DOI: 10.1002/adma.19950070710 Document Type: Article |
Times cited : (89)
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References (28)
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