In Situ Annealing Studies of Sol‐Gel Ferroelectric Thin Films by Spectroscopic Ellipsometry

Journal of the American Ceramic Society

Volumn 78, Issue 7, 1995, Pages 1907-1913

  Trolier‐McKinstry, Susan ^a   Chen, Jiayu ^a   Vedam, Kuppuswami ^a   Newnham, Robert E ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; DIELECTRIC PROPERTIES OF SOLIDS; ELLIPSOMETRY; HIGH TEMPERATURE OPERATIONS; LEAD COMPOUNDS; OPTICAL DEVICES; SOL-GELS; THIN FILMS; TITANIUM OXIDES; ZIRCONIA;

OPTICAL FREQUENCY;

FERROELECTRIC MATERIALS;

EID: 0029336341     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1995.tb08908.x     Document Type: Article

References (17)

1. Spectroscopic Ellipsometry: A New Tool for Nondestructive Depth Profiling and Characterization of Interfaces
2. Microstructural Evolution of Ultrathin Amorphous Silicon Films by Real‐Time Spectroscopic Ellipsometry
3. Determination of the Optical Function n(λ) of Vitreous Silica by Spectroscopic Ellipsometry with an Achromatic Compensator
4. Optical Characterization of Inhomogeneous Transparent Films on Transparent Substrates by Spectroscopic Ellipsometry
5. 3 Films on Sapphire and Pt‐Coated Silicon Substrates
6. Sol‐Gel‐Derived PZT Thin Films for Switching Applications
7. Rapid Thermal Annealing of Sol‐Gel‐Derived Lead Zirconate Titanate Thin Films
8. 3 Ferroelectric Thin Films by the Sol‐Gel Process
9. 3 Thin Films by an Optical Method
10. 3 (PZT) Thin Films
11. 2/Si Substrates
12. 3 Ferroelectric Films
13. Spectroscopic Ellipsometry Studies of Ferroelectric Thin Films
14. Effect of Heating Rate on the Crystallization Behavior of Amorphous PZT Thin Films
15. The Dependence of Ferroelectric and Fatigue Behaviors of PZT Films on Microstructure and Orientation
16. 3 Thin‐Layers