Micromachined Millimeter-wave SIS-mixers

IEEE Transactions on Applied Superconductivity

Volumn 5, Issue 2, 1995, Pages 1087-1090

  de Lange, Gert ^a   Jacobson, Brian R ^a   Hu, Qing ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT TESTING; ELECTRONIC STRUCTURE; ETCHING; FABRICATION; HORN ANTENNAS; JOSEPHSON JUNCTION DEVICES; MEMBRANES; MILLIMETER WAVE DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; SILICON WAFERS; TUNNEL JUNCTIONS;

ANISOTROPIC KOH ETCHING; ANTENNA COUPLED SUPERCONDUCTING TUNNEL JUNCTION; MICROMACHINED MILLIMETER WAVE SIS MIXERS; MIXER DESIGN; PYRAMIDAL HORN STRUCTURE; THIN SILICON NITRIDE MEMBRANE;

MIXER CIRCUITS;

EID: 0029327746     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.402758     Document Type: Article

References (9)

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