![]() |
Volumn 34, Issue 6R, 1995, Pages 3209-3215
|
The relationship between the bending stress in silicon wafers and the mechanical strength of silicon crystals
|
Author keywords
Bending stress; Elastic theory; Mechanical strength; Silicon; Strain rate; Upper yield stress
|
Indexed keywords
BENDING (DEFORMATION);
CRYSTALS;
DISLOCATIONS (CRYSTALS);
ELASTICITY;
INDUSTRIAL FURNACES;
OXYGEN;
SHEAR STRESS;
SILICON WAFERS;
STRAIN;
STRENGTH OF MATERIALS;
YIELD STRESS;
BENDING STRESS;
ELASTIC THEORY;
SILICON CRYSTALS;
SEMICONDUCTING SILICON;
|
EID: 0029325524
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.34.3209 Document Type: Article |
Times cited : (11)
|
References (27)
|