메뉴 건너뛰기




Volumn 34, Issue 6R, 1995, Pages 3209-3215

The relationship between the bending stress in silicon wafers and the mechanical strength of silicon crystals

Author keywords

Bending stress; Elastic theory; Mechanical strength; Silicon; Strain rate; Upper yield stress

Indexed keywords

BENDING (DEFORMATION); CRYSTALS; DISLOCATIONS (CRYSTALS); ELASTICITY; INDUSTRIAL FURNACES; OXYGEN; SHEAR STRESS; SILICON WAFERS; STRAIN; STRENGTH OF MATERIALS; YIELD STRESS;

EID: 0029325524     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.34.3209     Document Type: Article
Times cited : (11)

References (27)
  • 5
    • 0041312115 scopus 로고
    • I eds. W. M. Bullis, U. Gösele and F. Shimura (Electrochemical Society, Pennington)
    • A. E. Stephens 1991 Defects in Silicon II eds. W. M. Bullis, U. Gösele and F. Shimura (Electrochemical Society, Pennington) Vol. 91-9, p. 389.
    • (1991) Defects in Silicon , vol.91-9 , pp. 389
    • Stephens, A.E.1
  • 10
    • 84957346251 scopus 로고
    • W. M. Bullis and W. C. O'Mara (Semiconductor Equipment and Materials International, Mountain View)
    • S. Arima 1993 Large-diameter Silicon Wafer Trends eds. W. M. Bullis and W. C. O'Mara (Semiconductor Equipment and Materials International, Mountain View) p. 39.
    • (1993) Large-Diameter Silicon Wafer Trends , pp. 39
    • Arima, S.1
  • 18
    • 19644391154 scopus 로고
    • W. M. Bullis, U. Gösele and F. Shimura (Electrochemical Society, Pennington)
    • T. Fukuda and A. Ohsawa 1991 Defects in Silicon II eds. W. M. Bullis, U. Gösele and F. Shimura (Electrochemical Society, Pennington) Vol. 91-9, p. 173.
    • (1991) Defects in Silicon II , vol.91-9 , pp. 173
    • Fukuda, T.1    Ohsawa, A.2
  • 27
    • 84957348907 scopus 로고
    • American Society for Testing Materials, Philadelphia
    • Annual Book of ASTM Standards (American Society for Testing Materials, Philadelphia) Part 43, F121-76.
    • (1978) Annual Book of ASTM Standards , pp. FF21-FF76


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.