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Volumn 28, Issue 13, 1995, Pages 4608-4616

Synthesis and Photolithography of Polymers and Copolymers Based on Poly(3-(2-(methacryloyloxy)ethyl)thiophene)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COPOLYMERS; CROSSLINKING; ELECTRIC CONDUCTIVITY; GELS; GOLD COMPOUNDS; IRRADIATION; PHOTOCHEMICAL REACTIONS; PHOTOLITHOGRAPHY; SOLUBILITY; SYNTHESIS (CHEMICAL); ULTRAVIOLET RADIATION;

EID: 0029323072     PISSN: 00249297     EISSN: 15205835     Source Type: Journal    
DOI: 10.1021/ma00117a035     Document Type: Article
Times cited : (71)

References (62)
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    • Polymers for Microelectronics: Resists and Dielectrics, Thompson, L. F., Willson, C. G., Tagawa, S., Eds.; American Chemical Society: Washington, DC, 1994.
    • (1994) Polymers for Microelectronics: Resists and Dielectrics
  • 21
    • 0003955607 scopus 로고
    • 2nd ed.; Harper, C. A., Sampson, R. M., Eds.; McGraw-Hill, Inc.: New York
    • Electronic Materials & Processes Handbook, 2nd ed.; Harper, C. A., Sampson, R. M., Eds.; McGraw-Hill, Inc.: New York, 1994.
    • (1994) Electronic Materials & Processes Handbook
  • 22
    • 0002578796 scopus 로고
    • Reichmanis, E., Macdonald, S. A., Iwayanagi, T., Eds.; American Chemical Society: Washington, DC
    • Polymers in Microlithography: Materials and Processes; Reichmanis, E., Macdonald, S. A., Iwayanagi, T., Eds.; American Chemical Society: Washington, DC, 1989.
    • (1989) Polymers in Microlithography: Materials and Processes
  • 23
    • 0345594024 scopus 로고
    • Laser-induced generation and patterning of electrical conducting polymers
    • In Conwell, E. M., Stolka, M., Miller, R., Eds.; Proc. SPIE 1910
    • Bargon, J., Baumann, R. Laser-induced generation and patterning of electrical conducting polymers. In Electroluminescent Materials, Devices, and Large-Screen Displays, Conwell, E. M., Stolka, M., Miller, R., Eds.; Proc. SPIE 1910, 1993, 92.
    • (1993) Electroluminescent Materials, Devices, and Large-Screen Displays , pp. 92
    • Bargon, J.1    Baumann, R.2
  • 49
    • 0003492898 scopus 로고
    • Olah, G. A., Ed.; Interscience Publishers: London
    • Friedel—Crafts and Related Reactions; Olah, G. A., Ed.; Interscience Publishers: London, 1963; Vol. 1.
    • (1963) Friedel—Crafts and Related Reactions , vol.1
  • 60
    • 0013540169 scopus 로고
    • In Swern, D., Ed.; Interscience: New York
    • Silbert, L. S. In Organic Peroxides; Swern, D., Ed.; Interscience: New York, 1971; Vol. 2, pp 683–697.
    • (1971) Organic Peroxides , vol.2 , pp. 683-697
    • Silbert, L.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.