Fabrication of YBCO Step-Edge Josephson Junctions by Inverted Cylindrical Magnetron Sputtering Technique

IEEE Transactions on Applied Superconductivity

Volumn 5, Issue 2, 1995, Pages 2782-2785

  Chiara, A Di ^a   Lombardi, F ^a   Granozio, F Miletto ^a   Tafuri, F ^a   Valentino, M ^a   Pagano, S ^a   Ruggiero, B ^a   Russo, M ^a   Matarazzo, S ^b  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; FABRICATION; HYSTERESIS; LITHOGRAPHY; MAGNETIC FIELDS; MAGNETRON SPUTTERING; MODULATION; REACTIVE ION ETCHING; SQUIDS; THIN FILMS; TRANSFER FUNCTIONS;

JUNCTION PROPERTIES; NIOBIUM MASKS; SQUID VOLTAGE RESPONSE; STANDARD ION MILLING; STEP EDGE JUNCTION; WET CHEMICAL ETCHING;

JOSEPHSON JUNCTION DEVICES;

EID: 0029322152     PISSN: 10518223     EISSN: 15582515     Source Type: Journal    
DOI: 10.1109/77.403168     Document Type: Article

References (13)

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