Addressing automated materials handling in an existing wafer fab

Semiconductor International

Volumn 18, Issue 6, 1995, Pages

  Davis, Jeff ^a   Weiss, Mitchell ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; FACILITIES; MATERIALS HANDLING; PLANNING; PRODUCTIVITY; SYSTEMS ENGINEERING;

INTERBAY MATERIALS HANDLING; MATERIAL FLOW; STORAGE RETRIEVAL SYSTEMS; WAFER FAB AUTOMATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029321928     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)