Water adsorption at a polyimide/silicon wafer interface

Polymer Engineering & Science

Volumn 35, Issue 12, 1995, Pages 1000-1004

  Wu, Wen‐Li ^a   Orts, William J ^a   Hunston, Donald L ^a   Majkrzak, Charles J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; FILM PREPARATION; INTERFACES (MATERIALS); NEUTRON REFLECTION; POLYIMIDES; SILICON WAFERS; SINGLE CRYSTALS; WATER;

COUPLING AGENT; SPIN CASTING; WATER ADSORPTION;

ADSORPTION;

EID: 0029321727     PISSN: 00323888     EISSN: 15482634     Source Type: Journal    
DOI: 10.1002/pen.760351206     Document Type: Article

References (6)