Atomic force microscopy of Au implanted in sapphire

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 3, 1995, Pages 1198-1202

  Henderson, D O ^a   Mu, R ^a   Tung, Y S ^a   George, M A ^a   Burger, A ^a   Morgan, S H ^a   White, C W ^a   Zuhr, R A ^a   Magruder, R H ^a  

^a FISK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AMORPHOUS FILMS; ANNEALING; ATOMIC FORCE MICROSCOPY; COLLOIDS; CRYSTAL DEFECTS; CRYSTALS; GOLD; NATURAL FREQUENCIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SAPPHIRE; SURFACE PROPERTIES;

INFRARED REFLECTANCE; METAL COLLOIDS; OPTICAL SPECTRA; SURFACE PLASMON RESONANCE;

ION IMPLANTATION;

EID: 0029307203     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588235     Document Type: Article

References (20)