Oxide charge space correlation in inversion layers. II. Three-dimensional oxide charge distribution

Semiconductor Science and Technology

Volumn 10, Issue 5, 1995, Pages 592-600

  Gamiz, F ^a   Lopez Villanueva, J A ^a   Banqueri, J ^a   Ghailan, Y ^a   Carceller, J E ^a  

^a UNIVERSITY OF GRANADA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

COULOMB SCATTERING MODEL; ELECTRON EFFECTIVE MOBILITY; OXIDE CHARGE DISTRIBUTION; OXIDE SPACE CHARGE;

CHARGE TRANSFER; CORRELATION METHODS; ELECTRON TRANSPORT PROPERTIES; MOLECULAR DYNAMICS; MONTE CARLO METHODS; MOS DEVICES; SEMICONDUCTOR DEVICE MODELS; THREE DIMENSIONAL; TRANSISTORS;

ELECTRON SCATTERING;

EID: 0029306429     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/10/5/004     Document Type: Article

References (20)