Benzocyclobutene Optical Waveguides

IEEE Photonics Technology Letters

Volumn 7, Issue 5, 1995, Pages 535-537

  Kane, Casey F ^a   Krchnavek, Robert R ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENZOCYCLOBUTENE; NEGATIVE PHOTORESISTS;

ELECTRIC LOSSES; ELECTRON DEVICE MANUFACTURE; OPTICAL INTERCONNECTS; ORGANIC POLYMERS; PHOTORESISTS; REFRACTIVE INDEX;

OPTICAL WAVEGUIDES;

EID: 0029305714     PISSN: 10411135     EISSN: 19410174     Source Type: Journal    
DOI: 10.1109/68.384535     Document Type: Article

References (8)

1. A. Guha, J. Bristow. C. Sullivan, and A. Husain, “Optical interconnections for massively parallel architectures:’ Appl. Opt., vol. 29. no. 8. pp. 1077–1093, Mar. 10, 1990.
2. D. Hartman, “Use of guided wave optics for board level and mainframe level interconnects.” in Proc. Electron. Components Conf. Atlanta, 1991. pp. 463–474.
3. R. Kirchoff, C. Carriere. K. Bruza. N. Rondan, and R. Sammler. “Benzocyclobutenes: A new class of high performance polymers:’ 1. Macromolecular Sci.-Chem., vol, 28. nos. 11 & 12, pp. 1079–1113, 1991
4. D. Burdeaux, P. Townsend, J. Carr. and P. Garron. “Bcnzocyclobutene (BCB) dielectrics for the fabrication of high density. thin film multichip modules.” J. Electron. Mater: Vol. 19. no. 12. pp. 1357–1366, 1990.
5. C. Langhoff T. Stokich, and B. Heistand. “Benzocyclobutene (BCB): A polymer system for passive optical interconnects,” Optical Interconnects (SPIE) vol. 1849, pp. 336–341, 1993.
6. A trademark of the-bow Chemical Company. Midland MI.
7. Stoddard solvent supplied by OCG Microelectronics Materials. Inc., West Paterson, NJ.
8. E. A. J. Marcatilli, “Dielectric rectangular waveguides and directional coupler for integrated optics.” Bell Syst. Tech. J., vol. 48. pp. 2071–2102. 1969.